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Diagnostic of Capacitively Coupled Low Pressure Radio Frequency Plasma: An Approach through Electrical Discharge Characteristic

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Figure

Fig. 2.Equivalent circuit of the CCRF plasma discharge according to  homogeneous discharge model
Fig. 3.Typical current waveforms at 35 mtorr pressure  for different rf power.
Fig. 11 .Dependency of electron density with I rms .

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