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Characterization of Amorphous Tantalum Oxide for Insulating Acoustic Mirrors

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Figure

TABLE I.   A COUSTIC IMPEDANCE OF METALLIC AND INSULATING  MATERIALS
Figure 1.   Sketch of the test devices used for assessing the sound velocity in  sputtered TaO x  films
Figure 2.   Infrared transmision spectra between 2000 cm -1  and 400 cm -1  of
Figure 6.   Sound velocity of a set of TaO x  of different thicknesses grown
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