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Design, fabrication and characterization of a high speed, bimodal, CMOS MEMS resonant scanner driven by temperature gradient actuators

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Table 2.2: Performance comparison of EOCI systems based on MOEM scanners.
Figure 3.1: Generic geometry of an elastic, prismatic, layered composite beam.
Figure 3.2: Angle of rotation of a cantilever beam: (a) solution for large and small deflections and (b) relative percentage error of the solution.
Figure 3.5: First three normalized mode shapes of a prismatic homogenous can- can-tilever beam.
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