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Ti film deposition process of a plasma focus: Study by an experimental design

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Academic year: 2020

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Figure

FIG. 1. Schematic diagram of the PF-50J showing the electrical circuit and plasma dynamics (phases: I Breakdown;
FIG. 2. Digital images of selected samples. Voltage [kV]/Pressure [mbar]/Distance [mm]/Pulses from left to right: 26/5/9/80, 27/5/15/50, 27/6/15/20 and 28/5/21/80.
FIG. 3. SEM images of selected samples with marker length of 200µm on all the micrographs
FIG. 6. A typical XRD spectra analyzed, corresponding to the sample 26/5/9/80.
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