Figure A.1: Energy and angle distribution obtained by Monte Carlo simulations. Distri- bution functions for backscattering/sputtering energy 𝐸1 and angle 𝜃1 for He, Si and O recoils
(from TRIDYN simulations). The relative backscattering energy distribution 𝑝(𝐸1/𝐸0|𝐸0) for
the He ion (a) slightly depends on the incident energy 𝐸0 while the sputtering energy distribu-
tion 𝑝(𝐸1|𝐸0) for Si and O (c,b) show a pronounced dependence on it. The angular distribution
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