Comunicación

This study begins by reviewing the state of the art in Micro-stereolithography (MSL) technology, a novel fabrication technique of MEMS parts. The principles of MSL system are introduced in Chapter 2, followed by discussion of different development in the MSL materials and apparatus. The current interests and limitations of MSL technology are also described, indicating a need for better understanding of the mechanical properties to fully explore its potential. A comparison of approaches to mechanical (elastic) characterisation methods is given in Chapter 3. The emphasis is on the challenges of building accurate

mechanical characterisation for small MEMS parts. Several testing methods are examined, suggesting possible solutions for building an accurate mechanical characterisation testing on small MEMS materials.

Chapter 4 deals with the fabrication process of MSL specimens. It describes the basic fabrication process using a customized Envisiontec Perfactory MSL system with a commercial acrylate-based resin. The two major hurdles in fabricating small MSL specimens, shrinkage and curl distortion, are studied and briefly discussed.

Chapter 5 presents the design and implementation of a special form of tensile test-rig and compatible specially designed specimens for small scale measurement. Brief discussion of the rationale for choosing these concepts and an outline of the actual design is followed by preliminary results illustrating the practicality of the method. The calibration and the validation of test methods with verification of the preliminary data against results using a commercial Deben tensile device are also included. The results of geometry measurement and tensile testing on the resulting specimens under different fabrication conditions are given and briefly discussed in Chapter 6.

Chapter 7 thereafter discusses the test results of MSL specimens in a broader context. An analysis of the performance of the tensile test-rig is also included with discussions on critical parts of the design. Chapter 8 concludes this PhD study with a summary of its highlights and recommendations for future work.

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Chapter 2: Micro-stereolithography Technology