EXP Nº MATERIA FUNDAMENTOS DE LA DECISIÓN(*)

[1] A. Ohtomo and H. Hwang, A high-mobility electron gas at the LaAlO3/SrTiO3heterointerface, Nature427, 423 (2004).

[2] N. Nakagawa, H. Y. Hwang, and D. A. Muller, Why some interfaces cannot be sharp, Nature Materials5, 204 (2006).

[3] A. D. Caviglia, S. Gariglio, C. Cancellieri, B. Sac´ep´e, A. Fˆete, N. Reyren, M. Gabay, A. F. Morpurgo, and J.-M. Triscone, Two- Dimensional Quantum Oscillations of the Conductance atLaAlO3/SrTiO3

Interfaces, Phys. Rev. Lett.105, 236802 (2010).

[4] N. Banerjee, M. Huijben, G. Koster, and G. Rijnders,Direct patterning of functional interfaces in oxide heterostructures, Applied Physics Letters 100, 041601,1 (2012).

[5] D. J. Groenendijk, N. Manca, G. Mattoni, L. Kootstra, S. Gariglio, Y. Huang, E. van Heumen, and A. D. Caviglia, Epitaxial growth and thermodynamic stability of SrIrO3/SrTiO3 heterostructures, Applied

Physics Letters109, 041906 (2016).

[6] A. M. R. V. L. Monteiro, D. J. Groenendijk, N. Manca, E. Mulazimoglu, S. Goswami, Y. Blanter, L. M. K. Vandersypen, and A. D. Caviglia,Side Gate Tunable Josephson Junctions at the LaAlO3/SrTiO3Interface, Nano

Letters17, 715 (2017), PMID: 28071920.

[7] T. Ohnishi, K. Shibuya, M. Lippmaa, D. Kobayashi, H. Kumigashira, M. Oshima, and H. Koinuma, Preparation of thermally stable TiO2-

terminated SrTiO3(100)substrate surfaces, Applied Physics Letters85,

46 BIBLIOGRAPHY

[8] S. Piskunov, E. Heifets, R. Eglitis, and G. Borstel, Bulk properties and electronic structure of SrTiO3, BaTiO3, PbTiO3 perovskites: an ab initio

HF/DFT study, Computational Materials Science29, 165 (2004). [9] G. Koster, B. L. Kropman, G. J. H. M. Rijnders, D. H. A. Blank, and

H. Rogalla,Quasi-ideal strontium titanate crystal surfaces through forma- tion of strontium hydroxide, Applied Physics Letters73, 2920 (1998). [10] P. Brinks, W. Siemons, J. E. Kleibeuker, G. Koster, G. Rijnders,

and M. Huijben, Anisotropic electrical transport properties of a two- dimensional electron gas at SrTiO3-LaAlO3interfaces, Applied Physics

Letters98, 242904 (2011).

[11] D. M. Lallart, editor, Ferroelectrics - Material Aspects, Ferroelectricity in Silver Perovskite Oxides, InTech, 2011, ISBN: 978-953-307-332-3.

[12] Y. Z. Chen et al.,Extreme mobility enhancement of two-dimensional elec- tron gases at oxide interfaces by charge-transfer-induced modulation doping, Nature Materials14, 801 (2015).

[13] D. Stornaiuolo, C. Cantoni, G. M. D. Luca, R. D. Capua, E. D. Gen- naro, G. Ghiringhelli, B. Jouault, D. Marr`e, D. Massarotti, F. M. Gra- nozio, I. Pallecchi, C. Piamonteze, S. Rusponi, F. Tafuri, and M. Sal- luzzo,Tunable spin polarization and superconductivity in engineered oxide interfaces, Nature Materials15, 278 (2015).

[14] G. M. De Luca, R. Di Capua, E. Di Gennaro, F. M. Granozio, D. Stor- naiuolo, M. Salluzzo, A. Gadaleta, I. Pallecchi, D. Marr`e, C. Piamon- teze, M. Radovic, Z. Ristic, and S. Rusponi, Transport properties of a quasi-two-dimensional electron system formed in LaAlO3/EuTiO3/SrTiO3

heterostructures, Phys. Rev. B89, 224413 (2014).

[15] S. Thiel, G. Hammerl, A. Schmehl, C. W. Schneider, and J. Mannhart, Tunable Quasi-Two-Dimensional Electron Gases in Oxide Heterostruc- tures, Science313, 1942 (2006).

[16] E. D. Gennaro, U. Coscia, G. Ambrosone, A. Khare, F. M. Gra- nozio, and U. S. di Uccio, Photoresponse dynamics in amorphous- LaAlO3/SrTiO3interfaces, Scientific reports5, 1 (2015).

[17] S. Blundell, Magnetism in Condensed Matter, Oxford University Press, 2001, ISBN: 0-19-850592.

BIBLIOGRAPHY 47

[18] M. Stengel,First-Principles Modeling of Electrostatically Doped Perovskite Systems, Phys. Rev. Lett.106, 136803 (2011).

[19] C. Cantoni, J. Gazquez, F. Miletto Granozio, M. P. Oxley, M. Varela, A. R. Lupini, S. J. Pennycook, C. Aruta, U. S. di Uccio, P. Perna, and D. Maccariello, Electron Transfer and Ionic Displacements at the Origin of the 2D Electron Gas at the LAO/STO Interface: Direct Measurements with Atomic-Column Spatial Resolution, Advanced Materials 24, 3952 (2012).

[20] Y. Z. Chen, Y. L. Gan, D. V. Christensen, Y. Zhang, and N. Pryds,Ef- fect of Sr-doping of LaMnO3spacer on modulation-doped two-dimensional

electron gases at oxide interfaces, Journal of Applied Physics121, 095305 (2017).

[21] L. Library, Crystal Field Theory, 2017, Chemistry LibreTexts. [22] C. GmbH, SrTiO3for Research and Development, 2017, data sheet.

[23] M. M. Greve and B. Holst,Optimization of an electron beam lithography instrument for fast, large area writing at 10 kV acceleration voltage, J. Vac. Sci. Technol. B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena31, 043202 (2013).

[24] Y. Chen, Nanofabrication by electron beam lithography and its applica- tions:A review, Microelectronic Engineering135, 57 (2015).

[25] M. Altissimo, E-beam lithography for micro-/nanofabrication, Biomi- crofluidics4, 026503,1 (2010).

[26] B. Bhushan, editor, Encyclopedia of Nanotechnology, Springer, 2012, ISBN 978 90 481 9750 7.

[27] A. T. Wolde, editor, Nanotechnology. Towards a molecular construction kit, 1998, ISBN 90 840496 1 X, STT60.

[28] N. Jiang,On the spatial resolution limit of direct-write electron beam lithog- raphy, Microelectronic Engineering168, 41 (2017).

[29] C. Vieu, F. Carcenac, A. P´epin, Y. Chen, M. Mejias, A. Lebib, L. Manin- Ferlazzo, L. Couraud, and H. Launois,Electron beam lithography: reso- lution limits and applications, Applied Surface Science164, 111 (2000).

48 BIBLIOGRAPHY

[30] L. Martin, Y.-H. Chu, and R. Ramesh,Advances in the growth and char- acterization of magnetic, ferroelectric, and multiferroic oxide thin films, Ma- terials Science and Engineering: R: Reports68, 89 (2010).

[31] P. Kelly and R. Arnell,Magnetron sputtering: a review of recent develop- ments and applications, Vacuum56, 159 (2000).

[32] P. M. Leufke, A. K. Mishra, A. Beck, D. Wang, C. Ku ¨ubel, R. Kruk, and H. Hahn,Large distance rf and dc sputtering of epitaxial La1−xSrxMnO3

thin films, Thin Solid Films520, 5521 (2012).

[33] M. Lovell and R. Richardson, Analysis methods in neutron and X-ray reflectometry, Current Opinion in Colloid and Interface Science4, 197 (1999).

[34] G. Binning, C. Quate, and C. Gerber,Atomic Force Microscope, Physical Review Letters56, 930 (1986).

[35] D. Rugar and P. Hansma,Atomic Force Microscopy, Physics Today43, 23 (1990).

[36] J. I. AG, NanoWizard AFM Handbook, 2012, Version 2.2a.

[37] SIGMA-ALDRICH, Specification and safety data sheet PEDOT:PSS, 2017.

[38] AllResist, Protective Coating Electra 92 (AR-PC 5090-5091), 2017, data sheet.