In summary, we have performed piezoresponse force microscopy on a 100 nm film of PZT over the temperature range 25-400 °C. The piezoresponse increases with temperature but decreases at about 400 °C, which we believe corresponds to the PZT Curie temperature. This work opens possibilities for nanoelectromechanical measurements at temperature well above the heating temperature of commercial AFM heater stages.
28
2.7 References
[1] N. Setter, D. Damjanovic, L. Eng, G. Fox, S. Gevorgian, S. Hong, A. Kingon, H. Kohlstedt, N. Y. Park, G. B. Stephenson, I. Stolitchnov, A. K. Taganstev, D. V. Taylor, T. Yamada, and S. Streiffer, "Ferroelectric thin films: Review of materials, properties, and applications", Journal of Applied Physics, vol. 100, no. 5, 2006.
[2] M. E. Lines and A. M. Glass, Principles and applications of ferroelectrics and related
materials. Oxford: Clarendon Press, 1977.
[3] R. B. Olsen, D. A. Bruno, and J. M. Briscoe, "Pyroelectric conversion cycles", Journal of
Applied Physics, vol. 58, no. 12, pp. 4709-4716, 1985.
[4] I. Vrejoiu, G. Le Rhun, L. Pintilie, D. Hesse, M. Alexe, and U. Goesele, "Intrinsic ferroelectric properties of strained tetragonal PbZr0.2Ti0.8O3 obtained on layer-by-layer
grown, defect-free single-crystalline films", Advanced Materials, vol. 18, no. 13, p. 1657, 2006.
[5] V. Nagarajan, A. Stanishevsky, L. Chen, T. Zhao, B. T. Liu, J. Melngailis, A. L. Roytburd, R. Ramesh, J. Finder, Z. Yu, R. Droopad, and K. Eisenbeiser, "Realizing intrinsic piezoresponse in epitaxial submicron lead zirconate titanate capacitors on Si",
Applied Physics Letters, vol. 81, no. 22, pp. 4215-4217, 2002.
[6] M. Fiebig, V. V. Pavlov, and R. V. Pisarev, "Second-harmonic generation as a tool for studying electronic and magnetic structures of crystals: review", Journal of the Optical
Society of America B-Optical Physics, vol. 22, no. 1, pp. 96-118, 2005.
[7] K. J. Choi, M. Biegalski, Y. L. Li, A. Sharan, J. Schubert, R. Uecker, P. Reiche, Y. B. Chen, X. Q. Pan, V. Gopalan, L. Q. Chen, D. G. Schlom, and C. B. Eom, "Enhancement of ferroelectricity in strained BaTiO3 thin films", Science, vol. 306, no. 5698, pp. 1005-
1009, 2004.
[8] C. H. Yang, J. Seidel, S. Y. Kim, P. B. Rossen, P. Yu, M. Gajek, Y. H. Chu, L. W. Martin, M. B. Holcomb, Q. He, P. Maksymovych, N. Balke, S. V. Kalinin, A. P. Baddorf, S. R. Basu, M. L. Scullin, and R. Ramesh, "Electric modulation of conduction in multiferroic Ca-doped BiFeO3 films", Nature Materials, vol. 8, no. 6, pp. 485-493, 2009.
[9] E. Z. Luo, Z. Xie, J. B. Xu, I. H. Wilson, and L. H. Zhao, "In situ observation of the ferroelectric-paraelectric phase transition in a triglycine sulfate single crystal by variable- temperature electrostatic force microscopy", Physical Review B, vol. 61, no. 1, p. 203, 2000.
[10] S. V. Kalinin and D. A. Bonnell, "Temperature dependence of polarization and charge dynamics on the BaTiO3 (100) surface by scanning probe microscopy", Applied Physics
Letters, vol. 78, p. 1116, 2001.
[11] S. V. Kalinin, A. N. Morozovska, L. Q. Chen, and B. J. Rodriguez, "Local polarization dynamics in ferroelectric materials", Reports on Progress in Physics, vol. 73, no. 5, p. 056502, 2010.
[12] X. K. Orlik, V. Likodimos, L. Pardi, M. Labardi, and M. Allegrini, "Scanning force microscopy study of the ferroelectric phase transition in triglycine sulfate", Applied
Physics Letters, vol. 76, no. 10, pp. 1321-1323, 2000.
[13] M. Abplanalp, L. M. Eng, and P. Gunter, "Mapping the domain distribution at ferroelectric surfaces by scanning force microscopy", Applied Physics A-Materials
29
[14] P. Maksymovych, S. Jesse, M. Huijben, R. Ramesh, A. Morozovska, S. Choudhury, L. Q. Chen, A. P. Baddorf, and S. V. Kalinin, "Intrinsic nucleation mechanism and disorder effects in polarization switching on ferroelectric surfaces", Physical Review Letters, vol. 102, no. 1, p. 017601, 2009.
[15] J. Lee, T. Beechem, T. L. Wright, B. A. Nelson, S. Graham, and W. P. King, "Electrical, thermal, and mechanical characterization of silicon microcantilever heaters", Journal of
Microelectromechanical Systems, vol. 15, no. 6, pp. 1644-1655, 2006.
[16] S. Jesse, H. N. Lee, and S. V. Kalinin, "Quantitative mapping of switching behavior in piezoresponse force microscopy", Review of Scientific Instruments, vol. 77, no. 7, p. 073702, 2006.
[17] H. Y. Guo, J. B. Xu, I. H. Wilson, Z. Xie, E. Z. Luo, S. Hong, and H. Yan, "Study of domain stability on (Pb0.76Ca0.24)TiO3 thin films using piezoresponse microscopy",
Applied Physics Letters, vol. 81, no. 4, pp. 715-717, 2002.
[18] S. Jesse, A. P. Baddorf, and S. V. Kalinin, "Dynamic behaviour in piezoresponse force microscopy", Nanotechnology, vol. 17, no. 6, pp. 1615-1628, 2006.
[19] S. Hong, H. Shin, J. Woo, and K. No, "Effect of cantilever-sample interaction on piezoelectric force microscopy", Applied Physics Letters, vol. 80, no. 8, pp. 1453-1455, 2002.
[20] A. N. Morozovska, S. V. Svechnikov, E. A. Eliseev, and S. V. Kalinin, "Extrinsic size effect in piezoresponse force microscopy of thin films", Physical Review B, vol. 76, no. 5, p. 054123, 2007.
[21] T. Yamada, H. Iwasaki, and N. Niizeki, "Piezoelectric and elastic properties of LaTiO3 -
Temperature characteristics", Japanese Journal of Applied Physics, vol. 8, no. 9, p. 1127, 1969.
[22] J. W. Hong, D. S. Kahng, J. C. Shin, H. J. Kim, and Z. G. Khim, "Detection and control of ferroelectric domains by an electrostatic force microscope", Journal of Vacuum
Science & Technology B, vol. 16, no. 6, pp. 2942-2946, 1998.
[23] J. Lee, R. Ramesh, V. G. Keramidas, W. L. Warren, G. E. Pike, and J. T. Evans, "Imprint and oxygen deficiency in (Pb,La)(Zr,Ti)O3 thin-film capacitors with La-Sr-Co-O
electrodes", Applied Physics Letters, vol. 66, no. 11, pp. 1337-1339, 1995.
[24] W. L. Warren, D. Dimos, G. E. Pike, B. A. Tuttle, M. V. Raymond, R. Ramesh, and J. T. Evans, "Voltage shifts and imprint in ferroelectric capacitors", Applied Physics Letters, vol. 67, no. 6, pp. 866-868, 1995.
[25] M. Alexe, C. Harnagea, D. Hesse, and U. Gösele, "Polarization imprint and size effects in mesoscopic ferroelectric structures", Applied Physics Letters, vol. 79, no. 2, pp. 242-244, 2001.
[26] A. N. Morozovska, E. A. Eliseev, and S. V. Kalinin, "Domain nucleation and hysteresis loop shape in piezoresponse force spectroscopy", Applied Physics Letters, vol. 89, no. 19, p. 192901, 2006.
[27] I. K. Bdikin, A. L. Kholkin, A. N. Morozovska, S. V. Svechnikov, S. H. Kim, and S. V. Kalinin, "Domain dynamics in piezoresponse force spectroscopy: Quantitative deconvolution and hysteresis loop fine structure", Applied Physics Letters, vol. 92, no. 18, 2008.
30 This work was published in
Journal of Applied Physics 112, 104106 (2012)