CAPÍTULO III. RESULTADOS
3.1. Respecto al objetivo de estimar un modelo econométrico que permita determinar la
While comparing experimental results performed on a HEMT-structure with the results of finite element simulations, we have seen that the deposition of a gold layer on top of the structure to make up the terminals source, gate and drain is not homogenous and has considerable roughness. In particular, we have noted that the effect of the gold film is very pronounced and thus can be exploited for further investigations. In this frame, we are looking forward to finding a calibration procedure based on the thermal expansion of the gold film in order to determine the temperature of the hot spot.
8.2.3 3-D finite element simulations
FE simulations performed in this work were essentially reduced to 1-D or to 2-D models in accordance with the nature of the thermal loads applied on the structures. For example, in the case of HEMT-structures, where the main interest was limited to the active area, the line source in the very neighborhood of the gate, induced by a modulated Joule heating applied on a point near the gate, at the drain side, had a constant intensity across each cross-section of the line, thus giving the possibility to treat the heat transport as 2-D problem. However, if the hot line adjacent to the gate does not cover the entire gate width, a formulation of the 3-D thermal transport in the microstructure is more appropriate. We are also looking forward to building up numerical programs aimed at investigating such kinds of thermal wave problems.
Appendix
Appendix A: Characteristics of the
investigated samples
Samples Substrate Coating
Codes Form Material Thickness
/mm
Material Thickness /µm C6 cylindrical HSS (1) 3.18 DLC (1)-var 1 (2) ≈1-3
C4 parallelepipedic HMA 3.50 DLC-var 1 ≈1-3
F5 cylindrical HSS 3.51 DLC-var 2 ≈4
F3 parallelepipedic HMA 3.19 DLC-var 2 ≈4
X4 parallelepipedic HMA 3.19 DLC-var 3 ≈4
X7 cylindrical HSS 3.51 DCL-var 3 ≈4
A3 cylindrical HSS ≈1-2 DLC-var 4 ≈2-3
A5 cylindrical HSS ≈1-2 DCL-var 5 ≈2-3
119P2 cylindrical HSS ≈1-2 DLC-var 6 ≈2-3
22P1 cylindrical HSS ≈1-2 DLC-var 7 ≈2-3
(1) see the list of abbreviations (2) Variants of the DLC
8.2 Future work
Appendix B: Materials and their properties (RT) used for FE simulations
Sample
Chemical symbol and denomination Mass density kg m-3 Specific heat capacity J kg-1 K-1 Thermal conductivity W m-1 K-1 Coefficient of linear thermal expansion /K-1 Si Silicon 2328 700 115.0 2.60×10-6 SiO2 Silicon oxide 2200 745 1.400 0.50×10-6 GaAs Galium arsenide 5320 385.80 52.30 5.9×10-6 Au Gold 19300 130 320.0 14.2×10-6 GaN Galium nitride 6100 34 200.0 5.59×10-6 InSb Indium antimonide 5770 200 18.00 5.00×10-6 Pt Platinium 19970 144.10 52.08 8.00×10-6 W Tungsten 19345 132 176.0 4.50×10-6 H2O Water 1000 4186 0.600 Air (N2, O2, others) 1.16 1002 0.026
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Publications and conference contributions
Conference contributions
Eurotherm Seminar No 75, Microscale Heat Transfer 2, July 8-10, 2003, Reims, France
Potentialities of photothermal displacement experiments in micro-scaled systems J. L. Nzodoum Fotsing, B. K. Bein, J. Pelzl.
6th International Conference on Quantitative Infrared Thermography (QIRT), September 25-27, 2002, Dubrovnik, Croatia
Identification and Quantification of Heat Sources and Sinks, based on IR Thermography and Inverse Solutions of the heat diffusion equation
J. Gibkes, J. L. Nzodoum Fotsing, J. Pelzl, B.K. Bein.
11th International Conference on Photothermal and Photoacoustic Phenomena (ICPPP), June 24-27, 2002, Toronto, Canada
Optical Properties in the Visible and Infrared Spectrum of Fibre-reinforced Composites Determined by Combined Photoacoustic and IR Detection
J. Gibkes, J. L. Nzodoum Fotsing, D. Dietzel, B.K. Bein, J. Pelzl.
Surface modifications and surface-protective coatings analysed by means of thermal waves B. K. Bein, J. L. Nzodoum Fotsing, J. Gibkes, I. Delgadillo-Holfort, D. Dietzel, J. Pelzl.
German Acoustical Society Meeting (DAGA), March 4-8, 2002, Bochum, Germany
Calibration of Infrared Signals by the Photoacoustic Effect J. Gibkes, J. L. Nzodoum Fotsing, K. Simon, B.K. Bein, J.Pelzl.
Deutsche Physikalische Gesellschaft (DPG) Frühjahrstagung, March 26-30, 2001, Hamburg, Germany
Transmission Thermal Wave Measurements of Superinsulation Foils
J. L. Nzodoum Fotsing, A. Haj-Daoud, I. Delgadillo-Holtfort, D. Dietzel, J. Gibkes, N. Marquardt, J. Pelzl, B.K. Bein.
Publications and conference contributions
Publications
(1) Emissivity measurements by means of combined photoacoustics and modulated IR radiometry
J. Gibkes, J.L. Nzodoum Fotsing, B.K. Bein, J. Pelzl, accepted for publication in J. Phys. IV, 2004.
(2) Evaluation of active semiconductor structures by combined scanning thermo-elastic microscopy and finite element simulations
D. Dietzel, S. Chotikaprakhan, R. Meckenstock, J. L. Nzodoum Fotsing, J. Pelzl, R. Aubry, J.C. Jacquet, and S. Cassette, accepted for publication in J. Phys. IV, 2004.
(3) Analysis of semiconductor structures and devices by combined scanning thermal microscopy and scanning thermo-elastic microscopy
D. Dietzel, S. Chotikaprakhan, J. L. Nzodoum Fotsing, B.K. Bein, X. Filip, J. Pelzl, accepted for publication in J. Phys. IV, 2004.