Capítulo 4
Tabla 4.1. Condiciones de depósito de películas SiOx………..…….25
Tabla 4.2. Condiciones de depósito de películas SnOx………..26
Tabla 4.3. Características de electrómetro modelo 6517A ………...…………...…….30
Capítulo 5
Tabla 5.1. Resultados de espesor e índice de refracción para muestras de SiOx recién
depositadas………....31
Tabla 5.2. Resultados de índice de refracción para muestras de SiOx recién depositadas
(STT) y después de cada Tratamiento Térmico (TT)…………..………35
Tabla 5.3. Resultados de espesor e índice de refracción para muestras de SnOx recién
depositadas………..………..36
Tabla 5.4. Resultados de índice de refracción para muestras de SnOx recién depositadas
(STT) y después del Tratamiento Térmico (TT) a 600 ºC en N2……….…………..38
Tabla 5.5. Resumen del número de onda de los modos de vibración antes y después de cada tratamiento térmico (TT) en muestras de blanco de Si……….43 Tabla 5.6. Resumen del número de onda de los modos de vibración antes y después de cada tratamiento térmico (TT) en muestras de blanco de SiO………..44
Tabla 5.7. Resultados de rugosidad en películas de SiOx antes y después de cada
tratamiento térmico (TT)………...57
Tabla 5.8. Resultados de rugosidad en películas de SnOx antes y después del
tratamiento térmico (TT) a 600 ºC………...………...60
Tabla 5.9. Capacitancia mínima y máxima para películas de SiOx, obtenidas por curvas
C-V en alta y baja frecuencia, respectivamente ……….…72 Tabla 5.10. Capacitancia de óxido, permitividad y constante dieléctrica para las películas
~ 83 ~
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